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image of LTPS grains (scan size: 5 μm) shows an RMS roughness of approximately 10 nm and a grain size of 150 nm. LTPS is the abbreviation of Low Temperature Poly-Silicon, and mainly used in the display and solar photovoltaic industries. AFM characterization is essential for optimizing its surface morphology.

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[AFM] LTPS Grains
[AFM] LTPS Grains

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