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is image of LTPS grains (scan size: 5 μm) shows an RMS roughness of approximately 10 nm and a grain size of 150 nm. LTPS is the abbreviation of Low Temperature Poly-Silicon, and mainly used in the display and solar photovoltaic industries. AFM characterization is essential for optimizing its surface morphology.

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[AFM] LTPS Grains
[AFM] LTPS Grains
  • [WLI] 182 nm Standard Step Height
    [WLI] 182 nm Standard Step Height
  • [WLI] Girds Matrix
    [WLI] Girds Matrix
  • [WLI] Roughness Standard Sample
    [WLI] Roughness Standard Sample
  • [WLI] Laser Marked Sample
    [WLI] Laser Marked Sample
  • [WLI] Lubricant Seal Cover
    [WLI] Lubricant Seal Cover
  • [WLI] Metal Groove
    [WLI] Metal Groove
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