New Productivity in Hongkou | Exploring the Secrets of FreeSpirit Instruments: Creating a “Nanoscale Ruler” to Overcome Chip Manufacturing Measurement Problems

Imagine that when we need to measure the diameter of a hair, ordinary rulers are utterly useless - but “nanoscale rulers” made with precision instruments can accurately measure surface structures that are ten thousand times thinner than a hair. FreeSpirit Instruments is the creator of this “magic ruler”. Their self-developed high-end precision measurement equipment is like the “fierce eye” of scientists, helping to solve key dimension measurement in chip manufacturing, screen pixel defect detection and other problems.

Recently, reporters visited this high-tech company that specializes in surface precision measurement technology to explore the innovative stories and future plans behind it.

The Leap From University Laboratory to Industrialization

FreeSpirit Instruments was established in 2021. The founder and technical team are all from the Precision Instruments Department of Tianjin University. The core members of the team have been deeply involved in the fields of atomic force microscopes (AFMs) and white light interferometers (WLIs) for more than ten years, and have accumulated profound technical expertise.

Mr. Sen Wu, associate professor of Tianjin University, is the founder and chief scientist. The mask repair technology he developed has been authorized to the international giant Bruker and used in the EUV production lines of the world’s leading semiconductor companies.

According to Mr. Sen Wu’s introduction, the product line of FreeSpirit Instruments covers the fields of scientific research and industry. The main equipment includes: AFM-Baritone is a large-scale atomic force microscope designed for research and high-end industrial applications. It features a 200 mm fully automated sample stage, enabling topography and physical property analysis of various wafer sizes up to 8 inches and other sample types. AFM-Piccolo is a desktop atomic force microscope specifically developed for research users. Equipped with an ultra-thin AFM head, it features fully open space above and in front of the probe, making it particularly suitable for in-situ integration with various high-resolution optical microscopy systems. WLI-Marimba is a compact white light interferometer that quickly acquires 3D surface topography with a repeatability error as low as 0.008 nm. AFM-WLI Duet is a coaxial integrated system of the desktop ultra-thin head AFM-Piccolo and the Linnik-type white light interferometer WLI-Marimba. It utilizes white light interferometry for fast, large-area measurements and atomic force microscopy for small-area high-resolution measurements.

Wider Development Space

In 2024, FreeSpirit Instruments relocated its headquarters from Suzhou to Hongkou District, Shanghai. Talking about the reasons for settling in, co-founder Zhenhua Zhu said: “Shanghai’s business environment is first-class, and Hongkou District’s dedicated service and long-term vision are the key to impressing us. The location advantage, human resources and industrial linkage here will provide enterprises with broader development space. ”

Relying on the rich resources and talent advantages of surrounding universities, the True3D scanning technology exclusively developed by FreeSpirit Instruments can obtain the complete 3D topography of the sample sidewall at one time by improving the probe and vector scanning scheme, solving the measurement limitations of traditional AFM. In addition, innovations such as automatic needle exchange system and variable speed scanning technology further improve the reliability and efficiency of the equipment.

At present, the products have been delivered to well-known domestic universities and leading enterprises such as Shanghai Jiao Tong University and BOE, and have been applied in scientific research, semiconductors, display panels and other fields.

A New Benchmark for Domestic High-End Precision Measuring Instruments

Precision instruments and equipment are a high value-added, high profit margin, and highly intelligence-intensive segment. Its core competitiveness lies in continuous technological innovation and process accumulation. In this field, the value of a product is not only reflected in the hardware cost, but also in the R&D accumulation, patent barriers and customized service capabilities behind it.

At present, FreeSpirit Instruments has 8 invention patents and 3 utility model patents. Mr. Sen Wu emphasized: “We do not make low-end imitations, but benchmark against top international products and use technological innovation to win the trust of customers.” Although the scale is small in the start-up stage, the team is confident in long-term development and believes that the precision instrument industry requires the persistence of “slow work and meticulous work”.

Zhenhua Zhu said that FreeSpirit Instruments plans to occupy a certain market share in the next 3-5 years and gradually expand the international market to become a new benchmark for domestic high-end precision measurement equipment.

Reporter: Jianhua Yin

Editor: Jianhua Yin

Pictures: FreeSpirit Instruments, Shanghai Hongkou Media Center Picture Library

Source:Shanghai Hongkou Media Center