From Lab to Market: The Breakthrough Path of Domestic AFMs – An Interview with Associate Professor Sen Wu, Co-founder and Chief Scientist of FreeSpirit Instruments, by Instrument.com.cn

‌Introduction:‌ FreeSpirit Instruments specializes in the independent R&D of atomic force microscopes (AFMs) and white‑light interferometers (WLIs). It is committed to providing high‑end precision‑measurement solutions for domestic industries, as well as advancing scientific research and the development of the semiconductor industry.

As semiconductor manufacturing moves into the nanometer scale, and the development of new materials urgently requires precise surface characterization, a pressing need has emerged to overcome the bottleneck of domestically produced high-end instruments. FreeSpirit Instruments is targeting precisely this vast market opportunity of challenges and opportunities. They focus on core equipment such as atomic force microscopes (AFMs) and white light interferometers (WLIs), committed to delivering reliable, fully independent domestic solutions that provide robust metrology support for scientific research and the broader semiconductor industry.

Founded in 2021, FreeSpirit Instruments is a manufacturer of high-precision surface measurement instruments in China. The core products include Atomic Force Microscopes (AFMs) and White Light Interferometry Microscopes (WLIs). The leadership and technical team all come from the School of Precision Instrument and Opto-electronics Engineering at Tianjin University, who bring solid technical foundations and extensive practical experience. The company is committed to advancing the development of cutting-edge metrology technologies, providing reliable domestic solutions for scientific research and the broader semiconductor industry. Recently, the Materials Physics Department of Instrument.com.cn visited FreeSpirit Instruments production base - FreeSpirit (Suzhou) Instruments Co., Ltd. - to conduct a special interview with Dr. Sen Wu, co-founder and chief scientist of FreeSpirit Instruments and associate professor of Tianjin University. He shared the story of FreeSpirit Instruments’ growth.

Picture: Sen Wu, co-founder and chief scientist of FreeSpirit Instruments and associate professor of Tianjin University

‌From “Bookshelf” to “Store Shelf”: An Scholar’s Journey of “Turning Research into Practice”

In 2021, Suzhou Industrial Park welcomed the establishment of a company specializing in surface precision measurement equipment - FreeSpirit Instruments. Its birth stems from a simple belief in Sen Wu’s mind: “The mission of scientific researchers is to either see their work published on bookshelves or placed on store shelves.”

As a teacher at the Precision Instrument School of Tianjin University, Sen Wu’s research has always been focused on the field of atomic force microscopes. From his doctoral studies to his tenure as a faculty member, over a decade of dedicated research has elevated his understanding of this technology far beyond the theoretical realm. “At that time, we assessed that our technical level had reached a certain level of maturity, so we started the productization process - establishing the company,” Sen Wu recalled. “Turning research results into practice” was his original intention.

Behind this idea is the team’s solid technical accumulation. The core R&D team members of FreeSpirit Instruments are all from the Precision Instrument Department of Tianjin University - Sen Wu’s doctoral students. They joined the company directly after graduation, and several of them have been working with him for more than ten years. “We started the business with the ‘academic DNA’.” Sen Wu remarked. Years of collaboration fostered an innate understanding among the team regarding technical pain points and product logic, laying a solid foundation for subsequent product development.

Nowadays, FreeSpirit Instruments has formed a “three-site collaboration of R&D-production-operation” pattern: Suzhou serves as the production base, Tianjin hosts the R&D core, and the Shanghai headquarters is responsible for strategic coordination. In the past four years, the team has not only built multiple product lines as planned, but also achieved delivery to scientific research institutes and industrial customers in 2024. The brand promotion plan launched in 2025 has made the “FreeSpirit Instruments” begin to emerge in the industry.

“We focus on the independent research and development and manufacturing of surface precision measurement equipment, the current products are mainly atomic force microscopes and white light interferometers.” Talking about the company’s positioning, Sen Wu has a clear and firm goal. “First of all, we must become a leading company in the domestic surface precision measurement field. When the time is right in the future, we will expand more measurement technology-related businesses.” The current product lines include an atomic‑force‑microscope series—five models have been launched for the semiconductor and materials‑research fields—and a white‑light interferometer series, which offers one compact model and customized solutions.

Technological Breakthrough of “TJU‌ DNA”: Hard-Core Research Achieves Three Major Milestones

FreeSpirit Instruments’ technical confidence stems from its profound “‌TJU‌ DNA” and three key capability verifications:

A technology authorization obtained in 2018 remains vivid in Sen Wu’s memory. The mask repair technology based on atomic force microscopes developed by the team was favored by the world’s top manufacturers of atomic force microscopes. After authorization, this achievement was eventually used in the EUV production line of the leading international semiconductor company, solving the EUV mask repair problem that plagued the industry. “I never thought that a team like ours could export technology to top foreign companies and contribute to the world’s most advanced semiconductor manufacturing processes.” Sen Wu smiled and said. This authorization income not only became the start-up capital for the business, but also convinced the team: “Chinese technology can solve international problems.”

The real “hard-core research” took place in 2019. As the “engine” of the atomic force microscope, the controller directly determines the upper limit of the equipment’s measurement capability. The universal atomic force microscope controller they developed based on FPGA architecture integrates a large number of high-speed, high-precision ADCs and DACs, and can simultaneously achieve at least four channels of digital phase-locked-loop amplification. Its performance is directly comparable to first-class foreign products. In 2020, this controller was successfully delivered to Chinese counterparts and achieved mass production. After years of iteration, it has now become a domestic controller with top performance. “It demonstrates our development capabilities in key electronic systems and software and gives us confidence in our potential to develop high-end atomic force microscopes.”

In 2021, FreeSpirit Instruments achieved a breakthrough transition from components to complete systems. Supported by national key R&D projects, the team delivered a metrology-grade atomic force microscope capable of measuring 12-inch wafers to the National Institute of Metrology, China. This equipment is equipped with a self-developed 3D scanning probe, which has verified a series of innovative designs of optical paths and mechanical structures. In 2023, the team’s self-developed automated atomic force microscope for online inspection of large display panels completed a demonstration application in Wuhan CSOT and passed the acceptance of the Ministry of Science and Technology. “This verified the stability of our equipment in complex working conditions.” Sen Wu said.

These critical deliveries marked milestones in the journey from tackling technical components to forming complete systems, emboldening Sen Wu’s team to boldly embark on the path to productization.

Precision “Instruments”: Crafting a New Chapter in Measurement

Nowadays, FreeSpirit Instruments’ product line has begun to take shape. Entering the product world of FreeSpirit Instruments, you will encounter a romantic symphony of science and art - its AFM and WLI products are both named after musical instruments. “In English, both ‘scientific instrument’ and ‘musical instrument’ are translated as ‘instrument’,” Sen Wu explained with a smile, revealing the naming inspiration. AFM‑Baritone (named after the baritone voice, which lies between tenor and bass) symbolizes robust performance and features a 200 mm automated sample stage capable of handling 8‑inch wafers.   AFM‑Piccolo (named after the piccolo, a small high‑pitched woodwind) uses a 7 mm ultra‑thin probe, enabling in‑situ integration with optical‑microscopy systems—light and precise like the instrument itself.   WLI‑Marimba (named after the marimba, a percussion instrument similar to a xylophone) can be coaxially linked with the Piccolo system, delivering a synergy of large‑scale rapid scanning and micro‑area high‑resolution imaging.

Picture: AFM and WLI products are named after musical instruments

This scientist, who once played the clarinet in the Beiyang Art Troupe of TJU, injects artistic feelings into hard-core technology. The products he promotes have applications in scientific research and industry:

(1) AFM-Baritone 200 mm Stage Atomic Force Microscope

AFM-Baritone is a large-scale stage atomic force microscope designed for high-end research and industrial applications. It features a 200 mm fully automated sample stage, enabling analysis of various wafer sizes up to 8 inches and other sample types.

It has many automated functions, such as automatic needle change, automatic adjustment of gain and scanning speed, etc. It can detect sample topography and mechanical, electrical, and magnetic properties. It has been shipped to domestic head panel companies.

(2) AFM-Piccolo Desktop Ultra-Thin Probe Atomic Force Microscope

AFM-Piccolo is a desktop atomic force microscope specifically developed for research users. Equipped with an ultra-thin optical lever probe with an effective thickness of just over 7 mm, it features fully open space above and in front of the probe, making it particularly suitable for in-situ integration with various high-resolution optical microscopy systems (such as Raman, infrared, and fluorescence systems).

(3) WLI-Marimba Compact White Light Interferometer

WLI-Marimba is a compact white light interferometer developed for industrial and scientific research users. It is widely suitable for testing various material samples and can quickly obtain surface roughness, waviness and structural 3D outline dimensions.

Breaking Barriers: The Journey of Domestic Instruments with Both Advantages and Challenges

“Our equipment is no less than the flagship products of first-tier imported brands in terms of key technical indicators and basic performance quality,” Sen Wu bluntly stated about the core competitiveness of FreeSpirit Instruments. The team directly addresses the industry’s pain points through a series of original designs: The 3D orthogonal scanning probe is not limited by sample size and weight, eliminating image arch distortion; the automatic probe changing system completes probe loading and unloading and laser adjustment with “one click”, avoiding human errors; variable speed and variable gain scanning technology automatically optimizes scanning parameters, significantly extending the probe life and improving the imaging quality of samples with large fluctuations; the true 3D measurement mode realizes steep side wall detection and provides a complete 3D topography.

What deserves more attention is its cost-effective path. “We refuse to sacrifice quality for low prices, and “We refuse to sacrifice quality for low prices, and we refuse to rely on copying or imitation to reduce R&D costs,” Sen Wu emphasized. FreeSpirit Instruments chooses to use solid technological innovation to allow users to obtain excellent performance at a reasonable cost.

In the industrial market, FreeSpirit Instruments’s advantage lies in “quick response”. “We can analyze the special needs of semiconductor and panel companies in real time and quickly customize solutions based on our independent research and development capabilities.”

Despite possessing hard-core technology, Sen Wu frankly admitted that FreeSpirit Instruments still faces dual challenges: As a new brand in the industry, market awareness needs time to accumulate; scientific research and industrial customers have a long verification cycle for the effectiveness of domestic equipment, and deep trust needs to be supported by more successful cases.

They look forward to the market offering more opportunities and to building a relaxed, open, fair, and equitable market environment. Regarding this, Sen Wu has three expectations: On the demand side, he hopes to overcome the stereotype that “domestic products equal low‑end quality” and to establish performance‑oriented procurement criteria. On the competitive side, he aims to eliminate destructive low-price bidding practices and jointly foster a healthy market order. On the communication side, he seeks to strengthen enabling support, anticipating that more platforms will provide robust promotional channels to enhance the influence of the domestic instrument market.

When it comes to the future of domestic instruments, Sen Wu believes that it is at a “historic turning point”: Policy support, market demand, and technology accumulation have formed a triple resonance. He observed that in the field of atomic force microscope alone, more than 10 innovative companies have emerged in China (4 in Suzhou). “But this is just the starting point. Everyone must concentrate on developing technology and making characteristics,” is his optimism about the prospects of domestic instruments.

FreeSpirit Instruments’ goal is clear and firm: to seize policy and market opportunities for domestic instruments, to strive for breakthrough innovations, and to achieve a step‑by‑step leap in enterprise development. Sen Wu’s vision is very clear - he hopes that FreeSpirit Instruments will become a leader in this field within China, and then go global and become an internationally competitive brand. He also has a more emotional expectation: “I hope that when the next generation goes to college, they can use the instruments developed by their seniors in the laboratory - that would be a matter of great pride.”

Picture: Group photo during the visit

Postscript

In the highland of surface precision measurement, which has long been monopolized by international giants, FreeSpirit Instruments is tearing the gap with its solid “‌TJU‌ DNA” and hard-core innovation. As a professor at the Precision Instruments School of TJU, the founder has pushed the research results of more than ten years of atomic force microscope from the “bookshelf” to the “store shelf”, leading a doctoral team from the Precision Instruments Department of TJU to embark on a breakthrough path of deep integration of industry, academia and research.

Source:仪器信息网