AFM-Tenor
300mm Stage Atomic Force Microscope

AFM-Tenor utilizes machine vision-assisted magnetic control and clutch motor adjustment technology to achieve fully automated probe loading/unloading and laser alignment.

Reduce probe contamination or damage caused by manual handling

Enable rapid switching between probe types‌ during testing to meet diverse measurement requirements

Lower operational barriers and training costs, enabling quick proficiency for novice users

Ensure consistency and stability‌ in probe exchange operations, guaranteeing repeatability and reliability of test data

AFM-Tenor's automated laser alignment system utilizes dual-axis motor drive to automatically adjust the cantilever laser path, ensuring precise alignment of the laser with the designated position on the cantilever's backside and further centering it on the photodetector's effective area.

Precision motor control and advanced algorithms‌ enable efficient, accurate, and stable laser positioning

Intuitive and concise operation interface‌ with one-button control for user-friendly operation

Marvel AFM head developed by FreeSpirit Instruments features a large-range 3D orthogonal scanning capabilities, fully eliminating the sample size and weight limitations inherent in sample scanning structures.

Main scanner‌ utilizes a flexure-hinged stage structure, eliminating the inherent bowing distortion of traditional ceramic tube scanners

Z-axis‌ integrates a dual-feedback loop with two piezoelectric ceramics, balancing range and speed requirements:-15μm large-travel scanner‌ for low-frequency topography tracking;-2Μm small-travel scanner‌ for high-frequency feature feedback

Upright optical microscope enables coaxial visual image observation with autofocus, digital zoom, and illumination control

FreeSpirit Instruments's proprietary True3D mode utilizes an enhanced Flared-tip CD probe and variable-angle vector scanning technology to capture complete 3D topography, including left and right sidewalls, in a single scan. This provides users with more comprehensive and accurate critical dimension data.

No sample stage tilting required

No AFM head tilting required

No image stitching required

The variable-speed scanning technology integrated into FreeSpirit atomic force microscope automatically adjusts scanning speed and feedback gain in real time based on surface topography gradients. This reduces tip wear while enhancing the accuracy and efficiency of topography measurements.

Enhancing Image Clarity

When the probe scans near sample boundaries or areas with significant surface variations, the system automatically adjusts the scanning speed to allow sufficient time for precise detection, ensuring high-resolution imaging in these areas.

Extending Probe Lifespan

When the probe approaches raised areas, the system automatically reduces speed to minimize impact forces between the probe and sample, thereby extending probe lifespan.