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AFM-Tuba

AFM-Tuba
Large-Scale Stage Online Atomic Force Microscope

AFM-Tuba is an industrial automated atomic force microscope (AAFM) developed for meter-sized samples. It features a customized large-scale sample stage and manipulator, enabling ‌online, non-destructive measurement of large samples such as ‌display panels‌ and ‌advanced packaging‌.
Features
3D Scanning AFM Head Structure

FreeSpirit Instruments proprietary Marvel AFM Head features large 3D orthogonal scanning capabilities, completely bypassing the sample size and weight limitations in the sample-scan AFM systems.

Adopt flexible hinged flat scanner to eliminate the bow effect in the traditional tube scanner

Adopt two Z scanners with dual feedback control to ‌balance large-scale and fast ‌measurement requirement

Equipped with a motorized coaxial microscope to provide high-resolution optical images

Equipped with an automated probe exchange (APE) system to realize complete automation of probe loading/unloading and laser adjustment

Customized large-scale precision sample stage capable of meeting the load capacity requirements for display panels of different generations and other large-sized samples

Dual-drive gantry frame‌ provides mounting positions for both the AFM and WLI head, enabling ‌cross-scale in-situ measurement with dual heads

Specification
  • Scanner
    Flexible Hinged 3D Orthogonal Scanner
    XY Scan Range
    ≥100 μm × 100 μm
    Z Scan Range
    ≥10 μm
    Noise Level
    Z direction ≤0.5 nm RMS; AFM head ≤45 fm/Hz1/2
  • Sample Stage
    Equipped with Linear Encoder
    Load Stage Size
    Maximum Compatible with 8.6th Generation Display Panel
    Maximum Load Weight
    ≥20 kg
    XY Travel Range
    ≥1500 mm × 1850 mm (Other Sizes Available Upon Request)
    Displacement Resolution
    0.2 μm
    Repeatability
    ±3 μm
  • Optical System
    Objective Lens
    Support 5X/10X/20X Lens
    Field of View
    840 μm×630 μm(10X Objective Lens)
    Camera
    6.3 Million Pixels, Color CMOS
  • Controller
    Processor
    2×FPGA+1×DSP
    Analog-to-Digital Converter (ADC)
    4×High Speed ADC (40MS/s, 16bit)
    6×Middle Speed ADC (1MS/s, 20bit)
    4×Low Speed ADC (100kS/s , 24bit)
    Digital-to-Analog Converter (DAC)
    4×High Speed DAC (50MS/s, 16bit)
    6×Middle Speed DAC (1MS/s, 20bit)
  • AFM Mode
    AFM Mode

    Topography Imaging

    Contact Mode

    Tapping Mode

    Magnetic Mode

    Magnetic Force Microscopy (MFM)

    Electrical Mode

    Electrostatic Force Microscopy (EFM)

    Kelvin Probe Force Microscopy (KPFM)

    Piezoelectric Force Microscopy (PFM)

    Mechanical Mode

    Lateral Force Microscopy (LFM)

    Nano Indentation

    Hybrid Mode

    True3D

    Nano Lithography

    Nano Manipulation

Application
Webinars
  • Technological Advances and Applications of FreeSpirit Domestic High-End AFMs
    9/17/2025
    Technological Advances and Applications of FreeSpirit Domestic High-End AFMs
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    Label： Atomic Force Microscope (AFM) Industrial AFM Automated AFM
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