AFM-Tuner is a metrology AFM developed for wafer-level samples. It features a 300 mm fully automated sample stage and a 3D scanning head integrated with multi-channel laser interferometer, enabling metrological calibration of various standard samples.
Low-drift metrology framework with six-channel laser interferometer compensation for Abbe error
Support automated probe exchange
Support automated sample loading/unloading
Support programmable recipe automated measurement
Topography Imaging
Contact Mode
Tapping Mode
Magnetic Mode
Magnetic Force Microscopy (MFM)
Electrical Mode
Electrostatic Force Microscopy (EFM)
Kelvin Probe Force Microscopy (KPFM)
Piezoelectric Force Microscopy (PFM)
Mechanical Mode
Lateral Force Microscopy (LFM)
Nano Indentation
Hybrid Mode
True3D
Nano Lithography
Nano Manipulation