Current Location:Home > Products > Atomic Force Microscope (AFM) > AFM-Tuner

AFM-Tuner

AFM-Tuner
Wafer-Level Metrology Atomic Force Microscope

AFM-Tuner is a metrology AFM developed for wafer-level samples. It features a 300 mm fully automated sample stage and a 3D scanning head integrated with multi-channel laser interferometer, enabling metrological calibration of various standard samples.

Features

Low-drift metrology framework‌ with six-channel laser interferometer compensation for Abbe error

Support automated probe exchange

Support automated sample loading/unloading

Support programmable recipe automated measurement

Specification
  • Scanner
    Flexible Hinged 3D Orthogonal Scanner
    XY Scan Range
    ≥100 μm×100 μm
    Z Scan Range
    ≥15 μm
    Noise Level
    Z direction ≤0.05 nm RMS; AFM head ≤45 fm/Hz1/2
  • Sample Stage
    Equipped with Linear Encoder
    Maximum Sample Size
    Diameter ≥ 300 mm
    Maximum Load Weight
    ≥10 kg
    XY Travel Range
    ≥400 mm × 350 mm
    Displacement Resolution
    ≤0.1 μm
    Repeatability
    ±0.75 μm
    Rotatable Angle
    360°
    Angle Repeatability
    ±4”
  • Optical System
    Objective Lens
    Support 5X/10X/20X Lens
    Field of View
    840 μm×630 μm(10X Objective Lens)
    Camera
    6.3 Million Pixels, Color CMOS
  • Controller
    Processor
    2×FPGA+1×DSP
    Analog-to-Digital Converter (ADC)
    4×High Speed ADC (40MS/s, 16bit)
    6×Middle Speed ADC (1MS/s, 20bit)
    4×Low Speed ADC (100kS/s , 24bit)
    Digital-to-Analog Converter (DAC)
    4×High Speed DAC (50MS/s, 16bit)
    6×Middle Speed DAC (1MS/s, 20bit)
  • AFM Mode
    AFM Mode

    Topography Imaging

    Contact Mode

    Tapping Mode

    Magnetic Mode

    Magnetic Force Microscopy (MFM)

    Electrical Mode

    Electrostatic Force Microscopy (EFM)

    Kelvin Probe Force Microscopy (KPFM)

    Piezoelectric Force Microscopy (PFM)

    Mechanical Mode

    Lateral Force Microscopy (LFM)

    Nano Indentation

    Hybrid Mode

    True3D

    Nano Lithography

    Nano Manipulation

Application
Contact
  • *
  • * +86
  • *
  • *
  • *
  • *
  • *
  • I agree to receive product news and activity notifications from FreeSpirit Instrument and its affiliated companies through email, SMS, phone, and other means.
    I have carefully read and agree to the FreeSpirit Instrument Privacy Policy.

Data acquisition

Download immediately after submitting the information
  • *
  • *
  • *
  • *
  • *
  • *
  • *
  • I agree to receive product news and activity notifications from FreeSpirit Instrument and its affiliated companies through email, SMS, phone, and other means.
    I have carefully read and agree to the FreeSpirit Instrument Privacy Policy.