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AFM-WLI Duet

AFM-WLI Duet
AFM & WLI In-situ Combination System

AFM-WLI Duet is a coaxial integrated system of the desktop ultra-thin head AFM-Piccolo and the Linnik-type white light interferometer WLI-Marimba. It utilizes white light interferometry for fast, large-area measurements and atomic force microscopy for small-area high-resolution measurements. The combination of both offers users a convenient in-situ cross-scale topography characterization solution.
Features

AFM-Piccolo is a desktop atomic force microscope specifically developed for research users. Equipped with an ultra-thin AFM head, it features fully open space above and in front of the probe, making it particularly suitable for in-situ integration with various high-resolution optical microscopy systems.


WLI-Marimba (Linnik type) is a long working distance white light interferometer based on the Linnik configuration, specifically designed for combination with atomic force microscopes (AFM). When combinated with the AFM-Piccolo, it can achieve true integration of the AFM-WLI Duet head assembly, delivering high-precision topography measurements in a compact and user-friendly way.

Specification
AFM-Piccolo Technical Specification
  • Scanner
    Flexible Hinged 3D Orthogonal Scanner
    XY Scan Range
    ≥100 μm×100 μm
    Z Scan Range
    ≥5μm,（Optional 10 μm/15 μm/20 μm）
    System Noise Level
    ≤0.04 nm RMS
  • AFM Head
    Ultra-Thin Head
    Effective Thickness
    <8 mm
    Opening Width
    10 mm
    Detector Noise
    ~40 fm/Hz1/2
  • Sample Stage
    Manual Sample Stage
    Sample Size
    Diameter ≤30 mm, Thickness ≤5 mm
    Horizontal Adjustment Range of Engage Point
    ±15 mm

WLI-Marimba (Linnik-Type) Technical Specification
  • Measurement Unit
    Motor Drive
    Scan Range
    100 mm
    Three-Axis Adjustment Method
    Electric/Manual
  • Imaging Unit
    Linnik Type
    Magnification
    10X
    Numerical Aperture
    0.28
    Working Distance
    34 mm
    Lateral Resolution
    1.2 μm
  • Measurement Principle
    White Light Interferometry
    Relative Error in Step Height Measurement
    0.12% @ 1.762 μm
    0.21% @ 181.0 nm
    0.33% @ 45.5 nm
    Repeatability in Step Height Measurement
    0.27% @ 1.762 μm
    0.30% @ 181.0 nm
    0.28% @ 45.5 nm
    Repeatability in Surface Topography
    <0.180 nm
Application
Software
Applications in SRAM Testing

The AFM-WLI Duet utilizes the white light interferometer head within the integrated system to perform rapid, large-area 3D topography measurements on SRAM arrays. For critical cells within these arrays, the atomic force microscope head enables in-situ high-resolution topography and electrical property characterization.



Software
Applications in Square Grid Testing

The AFM-WLI Duet combines both a white light interferometer head and an atomic force microscope head to perform in-situ cross-scale characterization of grid-patterned standard samples. This method yields both broad-range three-dimensional topography, localized contour and roughness measurements, and also enabling comparative analysis of height measurements at identical locations across the two distinct measurement methods.


Webinars
  • Technological Advances and Applications of FreeSpirit Domestic High-End AFMs
    9/17/2025
    Technological Advances and Applications of FreeSpirit Domestic High-End AFMs
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