WLI-Marimba
Compact White Light Profiler

Drive Mode

Piezoelectric ceramic drive

Motor drive (customizable)

Scanning Range

100 μm

100 mm (customizable)

Three-Axis Adjustment Method

X-axis: Manual Y-axis: Manual Z-axis: Manual

X-axis: Electronic control/manual Y-axis: Electronic control/manual Z-axis: Electronic control/manual

Computer

Latest processor (GPU accelerated, customizable)

Display

HD display

Operating Software

Software for FreeSpirit Instruments

Objective Lens

Michelson/Mirau interference objective lens (SX-SOX) (customizable)

Camera

High-speed CCD camera (customizable)

Number of Pixels

1920*1080/2160*1440 (customizable)

Magnification

Michelson type: 5X

Mirau type: 10X 20X 30X

Numerical Aperture

Michelson type: 0.13

Mirau type: 0.3 0.4 0.55

Working Distance

Michelson type: 9.3 mm

Mirau type: 7.4 mm 4.7 mm 3.4 mm

Lateral Resolution ❶

Michelson type: 2.1 μ m

Mirau type: 0.92 μ m 0.48 µ m 0.21 µ m

Geometric Dimensions

20 cm (W) x 24 cm (D) x 40 cm (H)

Weight

20 kg

Voltage

100-240±10% VAC

‌Longitudinal Scanning Range

100 μm piezoelectric ceramic scanner

100 mm stepper motor scanner

Relative Error of Step Height Measurement ❷

0.12% @ 1.762 µm ± 0.010 µm
0.21% @ 181.0 nm ± 2.1 nm
0.33% @ 45.5 nm ± 1.2 nm

Step Height Measurement Repeatability ❸

0.27% @ 1.762 µm ± 0.010 µm
0.30% @ 181.0 nm ± 2.1 nm
0.28% @ 45.5 nm ± 1.2 nm

Surface Topography Repeatability ❹

<0.180 nm

RMS Repeatability ❺

0.008 nm

Measurement Uncertainty ❻

0.63% @ 1.762 µm ± 0.010 µm
1.19% @ 181.0 nm ± 2.1 nm
2.65% @ 45.5 nm ± 1.2 nm

Scanning Time ❼

2s @ 1024*1024*1000
6s @ 2048*2048*1000

Scanning Speed ❽

6 µm/s @ step=20 nm
18 µm/s @step=60 nm

Footnote

Performance parameters are obtained under laboratory conditions using standard samples in accordance with ISO 25178-601, ISO 25178-604, and ISO 5436-1.
❶ Lateral resolution follows the Sparrow criterion and depends on the objective lens.
❷ Relative error between the measured step height and the standard value.
❸ 1δ of the step height from 10 repeated measurements.
❹ 0.5 cycles of interference fringes (all bright or all dark) appear in the field of view. The 1δ of the difference plane is measured twice consecutively on a smooth SiC surface with Ra=0.178 nm in the repeated area.
❺ Under the same measurement conditions as ❹, the 1δ of the surface Sq is measured 30 times consecutively on a smooth SiC surface with Ra = 0.178 nm.
❻ Measurement uncertainty of step height during piezoelectric scanning.
❼ Image size: 1024*1024 pixel or 2048*2048 pixel, with 1000 images captured. May vary with configurations.
❽ Camera exposure time: 1000 μs, frame rate: 300 fps, captured image size: 1920*1080 pixel, 8bit format. May vary with configurations.