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FreeSpirit Instruments has developed FreeAnalysis, an offline analysis software for atomic force microscopes and white light interferometers, which provides standard functions such as leveling, filtering, 2D/3D display, cross-sectional analysis, roughness calculation, cropping, stitching, Fourier transform, etc. It also supports customized analysis functions for specific samples.

Cross-Sectional Roughness Analysis

2D Display

3D Display

Roughness Analysis

Step Height Analysis

Spectrum Analysis