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grid matrix structure with a scanning range of 0.1 mm×0.1 mm. The structure presents the clear and regular periodic array topography, with a grid matrix unit depth of approximately 8.5 nm, which can be used for calibration of related instruments or process analysis.

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Girds Matrix
Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
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    77-0.114,1.111-0.371 c0.514-0.37,0.827-0.998,0.827-1.653v-2.11C14.421,11.327,14.192,10.898,13.793,10.7L13.793,10.7z" /> +86 21 65208265/+86 17721158621

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