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Glass Substrate
  • The Square-Shaped Pattern of the PZT Material
    The Square-Shaped Pattern of the PZT Material
  • quare-shaped pattern with a scanning range of 15 μm. The red and blue parts represent different piezoelectric domain areas with a phase difference of 180°.

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    The Square-Shaped Pattern of the PZT Material
    The Square-Shaped Pattern of the PZT Material
  • Flat Mirror
    Flat Mirror
  • Convex Lens
    Convex Lens
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix