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and blue parts represent different piezoelectric domain areas with a phase difference of 180°.

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The Square-Shaped Pattern of the PZT Material
The Square-Shaped Pattern of the PZT Material
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
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