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ge of the polarized PZT square-shaped pattern with a scanning range of 15 μm. The red and blue parts represent different piezoelectric domain areas with a phase difference of 180°.

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The Square-Shaped Pattern of the PZT Material
The Square-Shaped Pattern of the PZT Material
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
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    www.w3.org/2000/svg" width="16" height="16" fill="currentColor" viewBox="0 0 16 16"> Room 2109, 21st Floor, Building 2, Ruihong Enterprise World, 118 Feihong Road, Hongkou District, Shanghai

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