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range of 0.890 mm × 1.208 mm, which can provide an analysis basis for the evaluation and improvement of mirror processing technology.

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Flat Mirror
Flat Mirror
  • Convex Lens
    Convex Lens
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
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    terial

    This is a Lockin Phase image of the polarized PZT square-shaped pattern with a scanning range of 15 μm. The red and blue parts represent different piezoelectric domain areas with a phase difference of 180°.

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    The Square-Shaped Pattern of the PZT Material
    The Square-Shaped Pattern of the PZT Material
  • Flat Mirror
    Flat Mirror
  • Convex Lens
    Convex Lens
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
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