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FreeSpirit (Shanghai) Precision Instrument Co., Ltd
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e of 1.65 mm × 1.65 mm, with a nominal height of 181.0 nm ± 2.1 nm. It can be used to evaluate the accuracy and repeatability of the measurement systems, providing metrological traceability and a reference for measurement equipment.

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182 nm Standard Step Height
182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
    • FreeSpirit (Shanghai) Precision Instrument Co., Ltd
    EN
    中