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of 2 μm, and its diameter is approximately 1.2 μm.

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Polymer Particle
Polymer Particle
  • Glass Substrate
    Glass Substrate
  • The Square-Shaped Pattern of the PZT Material
    The Square-Shaped Pattern of the PZT Material
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix