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ately 4 μm. It plays an important role in evaluating its sealing performance, analyzing wear conditions, and evaluating component reliability and durability.

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Lubricant Seal Cover
Lubricant Seal Cover
  • Metal Groove
    Metal Groove
  • Polished Silicon Wafer
    Polished Silicon Wafer
  • Metal Scratch
    Metal Scratch
  • Square-Shaped Pattern of the PZT Material" class="middleCenter">
    The Square-Shaped Pattern of the PZT Material
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer