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th a scanning range of 10 μm, and its roughness is 9.9 nm.

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Glass Substrate
Glass Substrate
  • The Square-Shaped Pattern of the PZT Material
    The Square-Shaped Pattern of the PZT Material
  • 182 nm Standard Step Height
    182 nm Standard Step Height
  • Girds Matrix
    Girds Matrix
  • Polished Silicon Wafer
    Polished Silicon Wafer
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