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    FREESPIRIT INSTRUMENTS
    FreeSpirit Instruments
    Setting a New Benchmark in High‑Precision Metrology
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    FREESPIRIT INSTRUMENTS
    FreeSpirit Instruments
    AFM-Baritone
    200 mm Stage Atomic Force Microscope
    AFM-Baritone is a large-scale atomic force microscope designed for research and high-end industrial applications. It features a 200 mm fully automated sample stage, enabling topography and physical property analysis of various wafer sizes up to 8 inches and other sample types.
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    FREESPIRIT INSTRUMENTS
    FreeSpirit Instruments
    AFM-Piccolo
    Desktop Ultra-Thin Probe Atomic Force Microscope
    AFM-Piccolo is a desktop atomic force microscope specifically developed for research users. Equipped with an ultra-thin AFM head, it features fully open space above and in front of the probe, making it particularly suitable for in-situ integration with various high-resolution optical microscopy systems.
Core Product
Core Products
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  • AFM-Baritone
    200 mm Stage Atomic Force Microscope
    AFM-Baritone
  • AFM-Piccolo
    Desktop Ultra-Thin Probe Atomic Force Microscope
    AFM-Piccolo
  • AFM-Tuba
    Large-Scale Stage Online Atomic Force Microscope
    AFM-Tuba
  • AFM-WLI Duet
    AFM & WLI In-situ Combination System
    AFM-WLI Duet
Industry Applications
Applications
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  • Semiconductor
    Semiconductor
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    2D Materials
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Latest News
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Events
  • The FreeSpirit Instruments x Phadcalc Atomic Force Microscope (AFM) Analysis Testing Center Landing in Chengdu, Combining High-End Instruments and Professional Services to Accurately Empower Scientific Research
    9/26/2025
    The FreeSpirit Instruments x Phadcalc Atomic Force Microscope (AFM) Analysis Testing Center Landing in Chengdu, Combining High-End Instruments and Professional Services to Accurately Empower Scientific Research
  • New Productivity in Hongkou | Exploring the Secrets of FreeSpirit Instruments: Creating a “Nanoscale Ruler” to Overcome Chip Manufacturing Measurement Problems
    8/19/2025
    New Productivity in Hongkou | Exploring the Secrets of FreeSpirit Instruments: Creating a “Nanoscale Ruler” to Overcome Chip Manufacturing Measurement Problems
  • From Lab to Market: The Breakthrough Path of Domestic AFMs – An Interview with Associate Professor Sen Wu, Co-founder and Chief Scientist of FreeSpirit Instruments, by Instrument.com.cn
    8/14/2025
    From Lab to Market: The Breakthrough Path of Domestic AFMs – An Interview with Associate Professor Sen Wu, Co-founder and Chief Scientist of FreeSpirit Instruments, by Instrument.com.cn
  • Innovative Measurement and Collaborating on the Future of Nanotechnology - FreeSpirit Instruments Invites You to Attend CHInano 2025 in Suzhou
    10/13/2025
    Innovative Measurement and Collaborating on the Future of Nanotechnology - FreeSpirit Instruments Invites You to Attend CHInano 2025 in Suzhou
  • Technological Advances and Applications of FreeSpirit Domestic High-End Atomic Force Microscopes (AFMs)
    9/17/2025
    Technological Advances and Applications of FreeSpirit Domestic High-End Atomic Force Microscopes (AFMs)
  • CIOE 2025 Concludes Successfully! FreeSpirit Instruments’ Domestic White Light Interferometer and Atomic Force Microscope Attract Attention
    9/15/2025
    CIOE 2025 Concludes Successfully! FreeSpirit Instruments’ Domestic White Light Interferometer and Atomic Force Microscope Attract Attention
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FreeSpirit (Shanghai) Precision Instrument Co., Ltd
EN
中
  • Home
  • Products
    • Atomic Force Microscope (AFM)
    • White Light Interferometry (WLI) 
    • Integrated Systems
    • Accessories
  • Applications
    • Semiconductor
    • Display
    • 2D Materials
    • Thin Film
  • Knowledge Center
    • Image Gallery
    • Case Studies
    • Webinars
    • FreeSpirit Academy
    • Download Center
  • News & Events
    • News
    • Events
  • Company
    • Overview
    • Careers
    • Social Media
  • Contact
    • Contact Information
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